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The VFT Vacuum Feed Through channels light into and out of a vacuum chamber for the optical monitoring in semiconductor processing and endpoint detection of thin film deposition.
· Performs well in NEMA Enclosures and in high-pressure applications
· Vacuum rated to 10-10 Torr
· Operates up to 350 °C
· Glass-to-metalized optical fiber improves performance
The VFT contains a robust novel metal-to-glass seal that improves the VFT's performance in ultra-high vacuum applications. Each VFT is tested and certified to 10-10 Torr and operates to 350 °C.
In addition to the VFT's usefulness in semiconductor and thin films processing, the VFT is ideal for the optical coatings production. It can also be used in molecular beam epitaxy and chemical and physical vapor deposition, and is perfect as a general-purpose penetrator for NEMA enclosures, glove boxes and moderate-pressure installations.
The VFT's high- and low-pressure sides are terminated to an SMA 905 Connector and couples easily to optical fibers and the Mikropack PlasCalc-2000-UV/VIS/NIR system.
The VFT can be screwed into a 3/8-24 external threaded hole in the vacuum chamber, or can be bolted into a smooth hole with the provided nut and washer. Optional aluminum-jacketed or armored-cable optical fiber assemblies are recommended for the low-pressure side of the chamber.
Vacuum Feed Throughs are available in optical fiber diameters of 200, 400, 600 and 1000 µm diameters. Each VFT includes two SMA Splice Bushings an inline adapter that mates SMA 905 Connectors.
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