Product Info

Real time and broad band fiberoptic spectrum acquisition
With its Mikropack high resolution miniature fiberoptic spectrometer equipped with a 2048 pixel CCD and fast acquisition electronics, the PlasCalc acquires plasma light emission from 200 to 1100 nm in 3 ms. The well engineered and PlasCalc process control systems brings benefits of sophisticated algorithms for data acquisition and signal treatment.

Rapid and easy recipe editor
This tool allows the process engineer to easily and rapidly build an efficient process recipe by single click navigation to functions. It is easy to combine all these functions to build robust recipes for the most difficult plasma processes.

Tools for efficient Plasma Diagnosis
The Integrated formula editor gives easy access to a full range of mathematical functions. A library of emission wavelengths is available as an option and gives direct access to species identification. The Wavelength editor allows their combination for signal to noise optimization. The double windows design gives easy access to the real actual spectrum and the monitoring screen with all process control information. In addition to endpoints, alarms monitor other events during  the run to detect process drifts.

Accurate end point on very low open area processes
The possibility of using many significant wavelengths across the whole spectrum simultaneously make it possible to build recipes that can handle the most difficult process conditions such as very low open area, multi stack etches and trenches.

Digital Reprocessing
Once an acquisition run has been stored in the database, it can be reprocessed digitally, to build a robust step  for accurate process monitoring and control. It minimizes the number of samples required for engineering. All runs can be saved as production runs for production simulation and analysis.

Full Connectivity
The USB-Interface concept makes it possible to connect to the fully hardware with only one USB connection. The hardware remote control with digital In/Output and analog Signal Output the PlasCalc is fully connectable to the process tool and the factory control system.