Here are some application which were measured successfully using the
NanoCalc-2000 system:
- Measurement of dielectric layers on wafer or glass
(SiO2, Si3N4, Photo-resist, ITO, ...)
- Extremely thin metal layers on wafer or glass (Ag, Al, Au, Ti, ...)
- SOI silicon thickness measurement (Silicon On Isolator)
- Thickness of thinned silicon wafer (< 120µm)
- Resist homogeneity check on semiconductor masks
- DVD/CD coating
- Coatings on lenses (Hard- and Antireflection-Coating)
- DLC (Diamond Like Carbon) hard-coatings
- Thickness measurement of different foils
- Air-gap measurement between mask and wafer in mask aligners
- extremely thick resists in MEMS application (100µm up to 250µm)
- Coating in bottles and injection syringe
- Integration into existing coating and etch systems for on-line process control
- And many, many more ...
Please let us know your specific application. A feasibility test measurement can be done without any charge.