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THIN FILM METROLOGY
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Hardware Setup  / Mapping

Beside thin film measurement tools Mikropack also offers specially designed and affortable motorized stages for 6”, 8” and 12” mapping of flat samples like wafers, masks or glass plates. In combination with the NanoCalc-Mapping software module this allows to generate 3D profile results to control easily the homogeneity of the layer/coating thickness on the sample.




Mapping Stage 6''



3 D Mapping result of spinn-coated resist layer (494nm) on semiconductor mask