Mikropack Thin Film Metrology

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Plasma Monitoring
Productinfo Applications Theory Hardware Setups - Chamber Setup
with Optic - Chamber Setup
with Vacuum
FeedThrough - OEM Integration

Ellipsometry
Productinfo Applications Theory Hardware Setups - Mapping - R-Theta Scanning - Combined with
Reflectometry

Reflectometry
Productinfo Applications Theory Hardware Setups - Online/Inline - Mapping - Mikroscope - RTL Stage /
transparent samples - CSH /
curved samples - Multiplexer /
Multipoint
Measurement - OEM Integration